Semicera's 2 ~ 6 inisi 4 ° off-angle P-ituaiga 4H-SiC substrates ua faʻainisinia e faʻafetaui le faʻatupulaia o manaʻoga o le mana maualuga ma le gaosiga o masini RF. O le 4° i fafo-angle orientation faʻamautinoaina le faʻatupulaia o le epitaxial, ma avea ai lenei mea ma faʻavae lelei mo le tele o masini semiconductor, e aofia ai MOSFET, IGBT, ma diodes.
O lenei 2 ~ 6 inisi 4 ° off-angle P-ituaiga 4H-SiC substrate o loʻo i ai mea faʻapitoa sili ona lelei, e aofia ai le maualuga o le vevela, faʻaogaina eletise lelei, ma le faʻamautuina o masini. Ole fa'ata'ita'iga i fafo e fesoasoani e fa'aitiitia ai le tele o le micropipe ma fa'aolaina ai le epitaxial layers, lea e taua tele i le fa'aleleia atili o le fa'atinoga ma le fa'amaoni ole masini semiconductor mulimuli.
Semicera's 2 ~ 6 inisi 4 ° off-angle P-ituaiga 4H-SiC substrates o loʻo maua i le tele o diameters, e amata mai i le 2 inisi i le 6 inisi, e fetaui ma manaoga eseese o gaosiga. O a matou mea'ai e fa'ainisinia tonu e tu'uina atu ai tulaga tutusa o le doping ma uiga maualuga maualuga, fa'amautinoa o lo'o fa'amalieina ta'itasi ta'ito'atasi ma fa'amatalaga sa'o mana'omia mo fa'aoga fa'aeletoroni fa'aeletonika.
O le tautinoga a Semicera i le faʻafouina ma le lelei e faʻamautinoa ai o la matou 2 ~ 6 inisi 4 ° off-angle P-type 4H-SiC substrates e tuʻuina atu faʻatinoga faifaipea i le tele o talosaga mai le eletise eletise i masini maualuga. O lenei oloa e maua ai se fofo faʻatuatuaina mo le isi augatupulaga o le malosi-lelei, maualuga-faʻatinoina semiconductors, lagolagoina le alualu i luma faatekinolosi i alamanuia e pei o taavale afi, fesoʻotaʻiga, ma le malosi faʻafouina.
Tulaga fa'atatau i le tele
Tele | 2-Inisi | 4-Inisi |
Diamita | 50.8 mm±0.38 mm | 100.0 mm+0/-0.5 mm |
Fa'ata'ita'iga i luga | 4° agai i<11-20>±0.5° | 4° agai i<11-20>±0.5° |
Primary Flat Umi | 16.0 mm±1.5mm | 32.5mm±2mm |
Lua Mafolafola Umi | 8.0 mm±1.5mm | 18.0 mm ± 2 mm |
Primary Flat Orientation | Fa'atusa <11-20>±5.0° | Fa'atasi<11-20>±5.0c |
Tulaga Lua mafolafola | 90°CW mai le tulaga muamua ± 5.0°, fa'asaga i luga le silikoni | 90°CW mai le tulaga muamua ± 5.0°, fa'asaga i luga le silikoni |
Fa'ai'uga | C-Face: Optical Polish, Si-Face: CMP | C-Face: OpticalPolish, Si-Face: CMP |
Wafer Edge | Fa'ata'oto | Fa'ata'oto |
Fa'asaa o luga | Si-Face Ra<0.2 nm | Si-Face Ra<0.2nm |
mafiafia | 350.0±25.0um | 350.0±25.0um |
Polytype | 4H | 4H |
Doping | p-ituaiga | p-ituaiga |
Tulaga fa'atatau i le tele
Tele | 6-Inisi |
Diamita | 150.0 mm+0/-0.2 mm |
Fa'asagaga i luga | 4° agai i<11-20>±0.5° |
Primary Flat Umi | 47.5mm ± 1.5mm |
Lua Mafolafola Umi | Leai |
Primary Flat Orientation | Fa'atasi ma <11-20>±5.0° |
SecondaryFlat Orientation | 90°CW mai le tulaga muamua ± 5.0°, fa'asaga i luga le silikoni |
Fa'ai'uga | C-Face: Polokalama Optical, Si-Face:CMP |
Wafer Edge | Fa'ata'oto |
Fa'asaa o luga | Si-Face Ra<0.2 nm |
mafiafia | 350.0±25.0μm |
Polytype | 4H |
Doping | p-ituaiga |