VAEGA/1CVD (Chemical Vapor Deposition) metotia: I le 900-2300 ℃, faʻaaoga TaCl5 ma CnHm e pei o tantalum ma puna kaponi, H₂ e faʻaitiitia ai le ea, Ar₂as ave kesi, faʻataʻitaʻiga faʻafefe.O le faʻapipiʻi saunia e faʻapipiʻi, toniga ma maualuga le mama.Ae ui i lea, o loʻo i ai nisi faʻafitauli ...
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