Semicera's 4", 6", ma le 8" N-type SiC Ingots o loʻo faʻatusalia ai se faʻalavelave i mea semiconductor, ua mamanuina e faʻafetaui ai le faʻatupulaia o manaʻoga o faʻaonaponei eletise ma eletise. faatinoga ma le ola umi.
O matou N-ituaiga SiC ingots e gaosia e faʻaogaina ai le gaosiga o gaosiga faʻaleleia e faʻaleleia ai le faʻaogaina o le eletise ma le mautu o le vevela. O le mea lea e lelei ai mo faʻaoga maualuga ma maualuga, e pei o inverters, transistors, ma isi masini eletise eletise lea e sili ona taua le lelei ma le faʻatuatuaina.
O le doping sa'o o nei ingots e fa'amautinoa ai latou te ofoina atu fa'atinoga faifaipea ma toe fai. O lenei fa'atumauina e taua tele mo tagata atia'e ma tagata gaosi oloa o lo'o tuleia tuaoi o tekinolosi i fanua e pei o le va'alele, ta'avale, ma feso'ota'iga. Semicera's SiC ingots e mafai ai ona gaosia masini e faʻaogaina lelei i lalo o tulaga ogaoga.
Filifilia o Semicera's N-type SiC Ingots o lona uiga o le tu'ufa'atasia o mea e mafai ona fa'afetauia le vevela maualuga ma le maualuga o uta eletise ma le faigofie. O nei ingots e fetaui lelei mo le fatuina o vaega e manaʻomia ai le faʻaogaina lelei o le vevela ma le faʻaogaina maualuga, e pei o le RF amplifier ma le eletise.
E ala i le filifilia mo Semicera's 4", 6", ma 8" N-type SiC Ingots, o loʻo e teu faʻafaigaluega i se oloa e tuʻufaʻatasia mea faʻapitoa faʻapitoa ma le saʻo ma le faʻamaoni e manaʻomia e tekinolosi semiconductor pito sili ona lata mai. Semicera faʻaauau pea ona taʻitaʻia le alamanuia tu'uina atu fofo fou e fa'aosoina ai le aga'i i luma ole gaosiga o masini eletise.
Aitema | Gaosiga | Suesuega | Faafoliga |
Fa'a tioata | |||
Polytype | 4H | ||
Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
Fa'aeletise Parata | |||
Fa'amamafa | n-ituaiga Nitrogen | ||
Tete'e | 0.015-0.025ohm·cm | ||
Fa'ailoga Fa'ainisinia | |||
Diamita | 150.0±0.2mm | ||
mafiafia | 350±25 μm | ||
Primary flat orientation | [1-100]±5° | ||
Muamua mafolafola umi | 47.5±1.5mm | ||
Lua mafolafola | Leai | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Fauga | |||
Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Uamea eleelea | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Tulaga Luma | |||
Luma | Si | ||
Fa'ai'uga luga | Si-foliga CMP | ||
fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
Faailoga leisa pito i luma | Leai | ||
Tulaga Tulaga | |||
Fa'ai'u tua | C-foliga CMP | ||
Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
faaletonu i tua | Leai | ||
Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
pito | |||
pito | Chamfer | ||
afifiina | |||
afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
*Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. |