Semicera's 4"6" High Purity Semi-Insulating SiC Ingots ua mamanuina ina ia ausia tulaga sa'o o le alamanuia semiconductor. O nei ingots e gaosia ma le taulaʻi i le mama ma le tumau, ma avea ai ma se filifiliga lelei mo le maualuga-mamana ma le maualuga-televave talosaga lea e sili ona taua le faatinoga.
O mea uiga ese o nei SiC ingots, e aofia ai le maualuga o le vevela ma le faʻamalosia o le eletise, e faʻapitoa ai mo le faʻaogaina i le eletise eletise ma masini microwave. O latou natura semi-insulating e mafai ai ona faʻamalo lelei le vevela ma faʻaitiitia le faʻalavelave eletise, e oʻo atu ai i vaega sili atu ona lelei ma faʻalagolago.
O lo'o fa'aaogaina e Semicera faiga fa'aonaponei fa'aonaponei e gaosia ai ni ingots fa'atasi ai ma le tulaga lelei ma le tulaga tutusa. O lenei sa'o e fa'amautinoa ai e mafai ona fa'atuatuaina le fa'aogaina o ingot ta'itasi i fa'aoga ma'ale'ale, e pei o fa'amalo maualuga, laser diodes, ma isi masini optoelectronic.
E maua uma i le 4-inisi ma le 6-inisi lapopoa, Semicera's SiC ingots e maua ai le fetuutuunai manaʻomia mo fua eseese gaosiga ma manaʻoga faatekinolosi. Pe mo suʻesuʻega ma atinaʻe poʻo le gaosiga tele, o nei ingots e tuʻuina atu le faʻatinoga ma le tumau e manaʻomia e faiga faʻaonaponei faʻaeletoroni.
E ala i le filifilia o Semicera's High Purity Semi-Insulating SiC Ingots, o lo'o e teu fa'afaigaluega i se oloa e tu'ufa'atasia fa'asaienisi meafaitino maualuluga ma tomai fa'apitoa tau gaosiga. Semicera o loʻo tuʻufaʻatasia i le lagolagoina o le faʻafouina ma le tuputupu aʻe o le semiconductor alamanuia, ofoina atu mea e mafai ai le atinaʻeina o masini faʻaeletoroni faʻasolosolo.
Aitema | Gaosiga | Suesuega | Faafoliga |
Fa'a tioata | |||
Polytype | 4H | ||
Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
Fa'aeletise Parata | |||
Fa'amamafa | n-ituaiga Nitrogen | ||
Tete'e | 0.015-0.025ohm·cm | ||
Fa'ailoga Fa'ainisinia | |||
Diamita | 150.0±0.2mm | ||
mafiafia | 350±25 μm | ||
Primary flat orientation | [1-100]±5° | ||
Muamua mafolafola umi | 47.5±1.5mm | ||
Lua mafolafola | Leai | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Fauga | |||
Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Uamea eleelea | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Tulaga Luma | |||
Luma | Si | ||
Fa'ai'uga luga | Si-foliga CMP | ||
fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
Faailoga leisa pito i luma | Leai | ||
Tulaga Tulaga | |||
Fa'ai'u tua | C-foliga CMP | ||
Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
faaletonu i tua | Leai | ||
Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
pito | |||
pito | Chamfer | ||
afifiina | |||
afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
*Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. |