Semicera's 6 Inisi N-ituaiga SiC Wafer tu i luma o tekinolosi semiconductor. Fausia mo le fa'atinoga sili ona lelei, o lenei wafer e sili atu i le maualuga-mamana, maualuga-vave, ma fa'aoga maualuga-vevela, e mana'omia mo masini fa'aeletoroni fa'aeletonika.
O la matou 6 Inisi N-ituaiga SiC wafer e faʻaalia ai le maualuga o le eletise eletise ma le maualalo o le tetee, o mea taua ia mo masini eletise e pei o MOSFET, diodes, ma isi vaega. O nei meatotino faʻamautinoa lelei le liua o le malosi ma faʻaitiitia le faʻatupuina o le vevela, faʻaleleia le faʻatinoga ma le ola o faiga faʻaeletoroni.
O faiga fa'atonutonu lelei a Semicera e fa'amautinoa ai o lo'o fa'atumauina lelei le mafolafola lelei o luga ma fa'aletonu laiti. O lenei va'ai toto'a i fa'amatalaga e fa'amautinoa ai e fa'amalieina e a tatou u'amea mana'oga o alamanuia e pei o ta'avale, va'alele, ma feso'ota'iga.
I le faaopoopo atu i ana mea eletise sili atu, o le N-type SiC wafer e ofoina atu le malosi o le vevela ma le tetee atu i le maualuga o le vevela, ma faʻalelei ai mo siosiomaga e ono le manuia ai mea masani. O lenei gafatia e sili ona taua i faʻaoga e aofia ai faʻagaioiga maualuga ma maualuga le malosi.
E ala i le filifilia o Semicera's 6 Inch N-type SiC Wafer, o loʻo e teu faʻafaigaluega i se oloa e faʻatusalia le tumutumu o semiconductor innovation. Matou te tuuto atu i le tuʻuina atu o poloka faufale mo masini faʻapitoa, faʻamautinoa o loʻo maua e a matou paaga i pisinisi eseese mea sili ona lelei mo a latou faʻagasologa faatekinolosi.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
