Semicera's 6 Inisi Semi-Insulating HPSI SiC Wafers ua mamanuina e faʻafetaui ai manaʻoga faigata o tekinolosi faʻaonaponei semiconductor. Faatasi ai ma le mama atoatoa ma le tumau, o nei wafers e avea o se faavae faatuatuaina mo le atinaʻeina o vaega eletise maualuga.
O nei HPSI SiC wafers ua lauiloa ona o latou faʻaogaina o le vevela ma le faʻaogaina o le eletise, lea e taua tele mo le faʻaleleia o le faʻatinoina o masini eletise ma taʻavale maualuga. Ole vaega ole semi-insulating e fesoasoani ile fa'aitiitia ole fa'alavelave eletise ma fa'ateleina le lelei ole masini.
O le tulaga maualuga o le gaosiga o gaosiga o lo'o fa'aogaina e Semicera e fa'amautinoaina ai e tofu lava le wafer ma le mafiafia tutusa ma le la'ititi o fa'aletonu. O lenei sa'o e mana'omia mo fa'aoga fa'apitoa e pei o masini fa'alava leitio, fa'aliliuga eletise, ma faiga fa'alelei, lea o le fa'atinoga ma le tumau o mea taua.
E ala i le fa'aogaina o faiga fa'aonaponei fa'aonaponei, e tu'uina atu ai e Semicera u'amea e le gata ina fa'amalieina ae sili atu i tulaga fa'apisinisi. O le 6-inisi le tele e ofoina atu le fetuutuunai i le faʻalauteleina o le gaosiga, faʻafeiloaʻi i suʻesuʻega ma faʻatauga faʻapisinisi i le vaega semiconductor.
Filifilia Semicera's 6 Inisi Semi-Insulating HPSI SiC Wafers o lona uiga o le teu fa'afaigaluegaina i se oloa e maua ai le tulaga lelei ma le fa'atinoga. O nei wafers o se vaega o le tautinoga a Semicera i le faʻalauteleina o agavaʻa o tekinolosi semiconductor e ala i mea fou ma tufuga faʻapitoa.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Fa'a tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amamafa | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
