Pepa SiC CVD Tele

Fa'amatalaga Puupuu:

O mama CVD SiC tele e fa'aogaina ai le kesi puna kasa (e pei o le silicon hydride) ma le kaponi puna kasa (e pei o le methane) e fai ma mea mata, fa'aalia i le maualuga o le vevela e teu ai mea tetele SiC i luga o se mea'ai po'o se limu. O lenei faiga e mafai ai e SiC ona tu'u tutusa i luga o se vaega tele, e fausia ai se fausaga mama malosi ma tumau.

Auina imeli ia matou

Fa'amatalaga Oloa

Faailoga o oloa

Aisea e fai ai le Silicon Carbide Etching Ring?

RTPCVD SiC mamae fa'aaogaina lautele i alamanuia ma fanua faasaienisi i le vevela maualuga ma siosiomaga corrosive. E faia se sao taua i le gaosiga o semiconductor, optoelectronics, masini saʻo ma alamanuia vailaʻau. O talosaga fa'apitoa e aofia ai:

1. Semiconductor gaosiga:RTP CVD SiC mamae mafai ona faʻaaogaina mo le faʻamafanafanaina ma le faʻamafanafanaina o masini semiconductor, tuʻuina atu le faʻamautuina o le vevela ma faʻamautinoa le saʻo ma le tumau o le faagasologa.

2. Optoelectronics: Ona o lona faʻaleleia lelei o le vevela ma le maualuga o le vevela, RTPCVD SiC mamae mafai ona faʻaaogaina e fai ma lagolago ma mea faʻamalo vevela mo lasers, mea faʻaoga fesoʻotaʻiga fiber optic ma mea faʻapitoa.

3. Masini saʻo: RTP CVD SiC mama e mafai ona faʻaogaina mo mea faʻapitoa ma meafaigaluega i le maualuga o le vevela ma le faʻaleagaina o siosiomaga, e pei o ogaumu vevela maualuga, masini masini ma vailaʻau kemisi.

4. Alamanuia vailaʻau: Ona o le faʻamaʻiina o le corrosion ma le mautu o vailaʻau, e mafai ona faʻaogaina mama RTP CVD SiC i totonu o koneteina, paipa ma reactors i vailaʻau faʻamaʻi ma gaioiga catalytic.

Epi System

RTP System

Faiga CVD

Fa'atinoga o oloa:

1. Faʻafeiloaʻi le faagasologa i lalo ole 28nm

2. Super corrosion tetee

3. Super mama faatinoga

4. Super maaa

5. maualuga maualuga

6. Tete'e maualuga vevela

7. La'ei tete'e

Fa'aoga oloa:

Silicon carbide mea o loʻo i ai uiga o le maualuga o le maʻaʻa, faʻaofuofu teteʻe, faʻamaʻi faʻamaʻi ma le maualuga o le vevela. O oloa e sili ona lelei le fa'atinoga o lo'o fa'aaogaina lautele i faiga fa'agogo ma TF/Diffusion.