Semicera e tuʻuina atu faʻapitoa tantalum carbide (TaC) coatings mo vaega eseese ma ave.Semicera taʻitaʻia faiga faʻapipiʻiina e mafai ai e tantalum carbide (TaC) coatings ona ausia le mama maualuga, maualuga le maualuga o le vevela ma le maualuga o le faʻapalepale o vailaʻau, faʻaleleia le lelei o oloa o tioata SIC / GAN ma lapisi EPI (Susceptor TaC fa'apipi'i graphite), ma fa'alauteleina le ola o vaega autu o le reactor. O le faʻaogaina o le tantalum carbide TaC coating o le foia lea o le faʻafitauli pito ma faʻaleleia le lelei o le tuputupu aʻe tioata, ma o Semicera ua faʻataunuʻuina le tantalum carbide coating technology (CVD), e oʻo atu i le tulaga maualuga faavaomalo.
Faatasi ai ma le oʻo mai o 8-inisi silicon carbide (SiC) wafers, o manaʻoga mo faʻagasologa semiconductor eseese ua faʻateleina le faʻamalosia, aemaise lava mo faiga epitaxy lea e mafai ai ona sili atu le vevela i le 2000 tikeri Celsius. O mea fa'aleaganu'u fa'aleaganu'u, e pei o le graphite o lo'o fa'apipi'iina i le silicon carbide, e masani ona fa'afefe i nei vevela maualuga, fa'alavelaveina le faiga o le epitaxy. Ae ui i lea, o le CVD tantalum carbide (TaC) e faʻafeiloaʻi lelei lenei mataupu, faʻasaga i le vevela e oʻo atu i le 2300 tikeri Celsius ma ofoina atu se olaga umi atu. Fa'afeso'ota'i Semicera's CVD Tantalum Carbide fa'apipi'i Afa masina pito i lugae su'esu'e atili e uiga ia matou fofo sili atu.
Ina ua mavae tausaga o atinae, ua manumalo Semicera le tekinolosi oCVD TaCfaatasi ai ma taumafaiga soofaatasi a le matagaluega R&D. O faaletonu e faigofie ona tupu i le faagasologa o le tuputupu ae o siC wafers, ae pe a uma ona faʻaaogainaTaC, e taua tele le eseesega. O loʻo i lalo se faʻatusatusaga o wafers ma e aunoa ma le TaC, faʻapea foʻi ma vaega o Simicera mo le tuputupu aʻe tioata tasi.
faatasi ai ma le leai foi o le TaC
Ina ua uma ona faaaoga TaC (taumatau)
E le gata i lea, o Semicera'sTaC-faʻapipiʻiina oloafaʻaalia le umi o le auaunaga ma le sili atu o le maualuga o le vevela faʻatusatusa iSiC coatings.O fua fa'asu'esu'e ua fa'aalia ai o le matouTaC coatingse mafai ona faatino i taimi uma i le vevela e oo atu i le 2300 tikeri Celsius mo vaitaimi faaumiumi. Lalo o nisi o faʻataʻitaʻiga oa matou faʻataʻitaʻiga: