Tantalum Carbide (TaC) Ufiufi Wafer Susceptor

Fa'amatalaga Puupuu:

Tantalum carbide coating ose fa'atekonolosi fa'apipi'i pito i luga o lo'o fa'aogaina mea tantalum carbide e fai ai se mea malu, fa'alava ma fa'a'ele'ele i luga ole pito. O lenei faʻapipiʻi o loʻo i ai mea sili ona lelei e faʻateleina ai le maaa o mea, maualuga le vevela ma le kemisi, aʻo faʻaitiitia le feteʻenaʻiga ma le ofuina. Tantalum carbide coatings o loʻo faʻaaogaina lautele i vaega eseese, e aofia ai fale gaosi oloa, aerospace, inisinia taʻavale ma mea faʻafomaʻi, e faʻalautele ai le ola o meafaitino, faʻaleleia le gaosiga lelei ma faʻaitiitia tau tausiga. Pe puipuia luga o u'amea mai le pala po'o le fa'aleleia o le ofuina ma le fa'ama'iina o vaega fa'ainisinia, tantalum carbide coatings e maua ai se tali fa'atuatuaina mo le tele o talosaga.


Fa'amatalaga Oloa

Faailoga o oloa

Semicera e tuʻuina atu faʻapitoa tantalum carbide (TaC) coatings mo vaega eseese ma ave.Semicera taʻitaʻia faiga faʻapipiʻiina e mafai ai e tantalum carbide (TaC) coatings ona ausia le mama maualuga, maualuga le maualuga o le vevela ma le maualuga o le faʻapalepale o vailaʻau, faʻaleleia le lelei o oloa o tioata SIC / GAN ma lapisi EPI (Susceptor TaC fa'apipi'i graphite), ma fa'alauteleina le ola o vaega autu o le reactor. O le faʻaogaina o le tantalum carbide TaC coating o le foia lea o le faʻafitauli o le pito ma faʻaleleia le lelei o le tuputupu aʻe tioata, ma o Semicera Semicera ua faʻataunuʻuina le tantalum carbide coating technology (CVD), e oʻo atu i le tulaga maualuga faavaomalo.

 

Ina ua mavae tausaga o atinae, ua manumalo Semicera le tekinolosi oCVD TaCfaatasi ai ma taumafaiga soofaatasi a le matagaluega R&D. O faaletonu e faigofie ona tupu i le faagasologa o le tuputupu ae o siC wafers, ae pe a uma ona faʻaaogainaTaC, e taua tele le eseesega. O loʻo i lalo se faʻatusatusaga o wafers ma e aunoa ma le TaC, faʻapea foʻi ma vaega o Simicera mo le tuputupu aʻe tioata tasi

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faatasi ai ma le leai foi o le TaC

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Ina ua uma ona faaaoga TaC (taumatau)

E le gata i lea, o le ola tautua a Semicera's TaC coating oloa e umi atu ma sili atu ona tetee i le maualuga o le vevela nai lo le SiC coating. A maeʻa se taimi umi o faʻamaumauga o suʻesuʻega suʻesuʻe, e mafai e le matou TaC ona galue mo se taimi umi i le maualuga o le 2300 tikeri Celsius. O nisi nei o matou fa'ata'ita'iga:

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(a) Ata fa'ata'ita'i o le masini fa'ato'a fa'ato'aga a le SiC e ala i le auala PVT (b) Fa'amau fatu fa'apipi'i pito i luga o le TaC (e aofia ai fatu SiC) (c) mama ta'iala graphite fa'apipi'i TAC.

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