O le pito i luma, ogatotonu ma tua pito o laina gaosiga o gaosiga semiconductor
Ole faiga ole gaosiga ole semiconductor e mafai ona vaevaeina i ni vaega se tolu:
1) pito pito i luma ole laina
2) I'uga ogatotonu o le laina
3) pito pito i tua o le laina
E mafai ona tatou faʻaogaina se faʻataʻitaʻiga faigofie e pei o le fausiaina o se fale e suʻesuʻe ai le faʻalavelave lavelave o le gaosiga o chip:
O le pito i luma o le laina gaosiga e pei o le faataatiaina o le faavae ma le fausiaina o puipui o se fale. I le gaosiga o le semiconductor, o lenei laasaga e aofia ai le fatuina o fausaga faavae ma transistors i luga o se masini wafer.
Laasaga Autu ole FEOL:
1. Fa'amama: Amata i se ma'i manifinifi kasa ma fa'amama e aveese ai so'o se mea leaga.
2. Oxidation: Fa'atupu se vaega o le silicon dioxide i luga o le wafer e vavae ese ai vaega eseese o le pu.
3.Photolithography: Fa'aoga photolithography e togi ai mamanu i luga o le wafer, pei o le tusia o ata i le malamalama.
4. Etching: Aveese le silicon dioxide e le manaʻomia e faʻaalia ai mamanu manaʻomia.
5.Doping: Fa'aofi mea le mama i totonu o le silikoni e sui ai ana mea eletise, fatuina transistors, o poloka faufale autu o soʻo se vaʻa.
Mid End of Line (MEOL): Feso'ota'i togi
Ole ogatotonu ole laina ole gaosiga e pei ole fa'apipi'iina o uaea ma paipa ile fale. O lenei laasaga e taulaʻi i le faʻavaeina o fesoʻotaʻiga i le va o transistors na faia i le tulaga FEOL.
Laasaga Autu ole MEOL:
1.Dielectric Deposition: Teuteu faʻapipiʻi lapisi (taʻua o dielectrics) e puipuia ai le transistors.
2.Contact Formation: Faʻapipiʻi fesoʻotaʻiga e faʻafesoʻotaʻi ai le transistors i le tasi ma le lalolagi i fafo.
3. Feso'ota'i: Fa'aopoopo fa'alava u'amea e fai ai auala mo fa'ailo eletise, e pei o le fa'aogaina o se fale e fa'amautinoa ai le fa'aogaina o le malosi ma le tafe o fa'amaumauga.
I'uga o le laina (BEOL): Fa'ai'u Pa'i
O le pito i tua o le laina gaosiga e pei o le faʻaopoopoina o paʻi mulimuli i se fale-faʻapipiʻi mea faʻapipiʻi, valiina, ma faʻamautinoa e lelei mea uma. I le gaosiga o le semiconductor, o lenei laasaga e aofia ai le faʻaopoopoina o faʻamaufaʻailoga mulimuli ma le saunia o le pu mo le afifiina.
Laasaga Autu ole BEOL:
1. Faʻaopoopo Faʻapipiʻi Metala: Faʻaopoopo le tele o uʻamea uʻamea e faʻaleleia ai le fesoʻotaʻiga, faʻamautinoa e mafai e le puʻu ona taulimaina galuega faʻalavelave ma saoasaoa maualuga.
2.Passivation: Faʻaogaina ni laupepa puipui e puipui ai le pu mai le faʻaleagaina o le siosiomaga.
3.Su'ega: Tu'u le va'a i su'ega faigata ina ia mautinoa e fetaui ma fa'amatalaga uma.
4. Dicing: 'Oti'oti le wafer i ni tupe meata'i ta'itasi, ua sauni ta'itasi mo le afifiina ma fa'aoga i masini fa'aeletoroni.
Semicera o se taʻutaʻua OEM gaosi oloa i Saina, faʻamaoni i le tuʻuina atu o tau faʻapitoa i a tatou tagata faʻatau. Matou te ofoina atu le tele o oloa ma auaunaga sili ona lelei, e aofia ai:
1.Fa'apipi'i CVD SiC(Epitaxy, vaega faʻapipiʻi CVD masani, faʻamalo maualuga mo faʻaoga semiconductor, ma isi mea)
2.Vaega Tele CVD SiC(Etch mama, mama taulaʻi, vaega masani SiC mo meafaigaluega semiconductor, ma sili atu)
3.Vaega Ufiufi CVD TaC(Epitaxy, SiC wafer tuputupu aʻe, maualuga-vevela talosaga, ma sili atu)
4.Vaega Graphite(vaa kalafi, vaega fa'aleaganu'u graphite mo le gaosiga o le vevela, ma isi mea)
5.Vaega SiC(SiC vaʻa, SiC ogaumu paipa, vaega SiC masani mo le gaosiga o meafaitino, ma isi mea)
6.Vaega Quartz(vaa Kuata, vaega quartz masani mo semiconductor ma alamanuia la, ma sili atu)
O la matou tautinoga i le tulaga lelei e faʻamautinoa ai matou te tuʻuina atu ni fofo fou ma faʻatuatuaina mo pisinisi eseese, e aofia ai le gaosiga o semiconductor, gaosiga o mea faʻapitoa, ma faʻaoga tekonolosi. Faatasi ai ma le taulai atu i le saʻo ma le lelei, matou te tuuto atu i le faʻafeiloaʻi o manaʻoga tulaga ese o tagata faʻatau taʻitasi.
Taimi meli: Tes-09-2024