Le Atina'e ma Fa'aoga ole Silicon Carbide (SiC)
1. A Century of Innovation in SiC
O le malaga a le silicon carbide (SiC) na amata i le 1893, ina ua mamanuina e Edward Goodrich Acheson le ogaumu a Acheson, e faʻaaoga ai mea kaponi e ausia ai le gaosiga o fale gaosi oloa o le SiC e ala i le faʻavevela eletise o le quartz ma le carbon. O lenei mea fou na faʻailogaina ai le amataga o le gaosiga a le SiC ma maua ai Acheson se pateni.
I le amataga o le 20th seneturi, na faʻaaoga muamua le SiC e avea o se mea faʻafefe ona o lona maʻaʻa mataʻina ma le ofuina o le teteʻe. E oo atu i le ogatotonu o le 20 seneturi, o le alualu i luma i le chemical vapor deposition (CVD) tekinolosi ua tatalaina ai avanoa fou. O tagata suʻesuʻe i Bell Labs, taʻitaʻia e Rustum Roy, na faʻataʻatia le faavae mo le CVD SiC, faʻataunuʻuina muamua SiC coatings i luga o graphite surfaces.
O le vaitau o le 1970 na vaʻaia ai se faʻalavelave tele ina ua faʻaaogaina e le Union Carbide Corporation le graphite faʻapipiʻi SiC i le faʻatupulaia o le epitaxial o mea semiconductor gallium nitride (GaN). O lenei alualu i luma na faia se sao taua i le maualuga o le GaN-faʻavae LED ma lasers. I le aluga o le tele o tausaga, ua faʻalauteleina le SiC coatings i tua atu o semiconductor i faʻaoga ile aerospace, taʻavale, ma eletise eletise, faʻafetai i le faʻaleleia o auala gaosi.
I aso nei, o faʻafouga e pei o le vevela vevela, PVD, ma le nanotechnology o loʻo faʻaleleia atili ai le faʻatinoga ma le faʻaogaina o SiC coatings, faʻaalia lona gafatia i fanua faʻatau.
2. Malamalama i Fauga tioata a SiC ma Fa'aoga
O le SiC e sili atu i le 200 polytypes, fa'avasegaina i latou fa'atonuga atomic i kupita (3C), hexagonal (H), ma rhombohedral (R) fausaga. Faatasi ai ma nei mea, o le 4H-SiC ma le 6H-SiC o loʻo faʻaaogaina lautele i masini maualuga ma optoelectronic, i le faasologa, ae o le β-SiC e faʻatauaina mo le maualuga o le faʻaogaina o le vevela, faʻaofuofu teteʻe, ma le pala.
β-SiC'suiga tulaga ese, e pei o le conductivity vevela o120-200 W/m·Kma se fa'aopoopoga fa'avevela fa'atasi e fetaui lelei ma le graphite, ia avea ma mea e sili ona fiafia i ai mo fa'alavalava i luga ole masini epitaxy wafer.
3. SiC Coatings: Meatotino ma Sauniuniga Tekinolosi
SiC coatings, e masani lava β-SiC, e faʻaaogaina lautele e faʻaleleia ai mea o loʻo i luga e pei o le maaa, teteʻe o lavalava, ma le mautu o le vevela. O auala masani o sauniuniga e aofia ai:
- Fa'afitia Ausa Fa'ama'i (CVD):Tuʻuina atu faʻaofuofu maualuga ma faʻapipiʻi lelei ma tutusa, lelei mo mea tetele ma lavelave.
- Fua Fa'aletino (PVD):E ofoina atu le fa'atonuga sa'o i luga o le fa'apipi'iina o mea fa'apipi'i, talafeagai mo fa'aoga sa'o maualuga.
- Faiga Fa'asa'i, Fa'aeletise Deposition, ma Slurry Pa'u: Auauna e fai ma sui tau-lelei mo faʻaoga faʻapitoa, e ui lava e iai faʻatapulaʻa faʻatapulaʻa i le pipii ma le tutusa.
O metotia taʻitasi e filifilia e faʻatatau i uiga o le substrate ma mea e manaʻomia.
4. SiC-Coated Graphite Susceptors i MOCVD
SiC-coated graphite susceptors e taua tele i Metal Organic Chemical Vapor Deposition (MOCVD), o se faiga autu i semiconductor ma optoelectronic mea gaosiga.
O nei susceptors e maua ai le lagolago malosi mo le tuputupu aʻe o ata epitaxial, faʻamautinoa le mautu o le vevela ma faʻaitiitia le faʻaleagaina o le eleelea. O le SiC coating e faʻaleleia ai foʻi le faʻamaʻiina o le faʻamaʻi, meatotino i luga, ma le lelei o fesoʻotaʻiga, e mafai ai ona faʻatonutonu saʻo i le taimi o le tuputupu aʻe o ata.
5. Agai i luma i le Lumanai
I tausaga talu ai nei, o taumafaiga taua na faʻatonuina i le faʻaleleia o le gaosiga o gaioiga o le SiC-coated graphite substrates. O loʻo taulaʻi tagata suʻesuʻe i le faʻaleleia o le mama o le ufiufi, tutusa, ma le umi o le olaga aʻo faʻaititia le tau. E le gata i lea, o le suʻesuʻeina o mea fou e pei otantalum carbide (TaC) coatingsofo atu le fa'aleleia atili o le fa'aa'ave'aina o le vevela ma le fa'a'ele'ele, fa'aavanoaina le ala mo vaifofo a le isi tupulaga.
A o faʻaauau pea ona faʻatupulaia le manaʻoga mo susceptors graphite SiC-coated, o le alualu i luma i le gaosiga atamai ma le gaosiga o mea tau alamanuia o le a atili lagolago ai le atinaʻeina o oloa maualuga e faʻafetaui ai manaʻoga faʻaleleia o le semiconductor ma optoelectronics alamanuia.
Taimi meli: Nov-24-2023