Semicera's P-ituaiga SiC Substrate Wafer ose vaega taua mo le atina'eina o masini eletise ma optoelectronic. O nei wafers ua faʻatulagaina faʻapitoa e tuʻuina atu ai le faʻaleleia atili o le faʻatinoga i le maualuga o le malosi ma le maualuga o le vevela, e lagolagoina ai le faʻatupulaia o le manaʻoga mo vaega lelei ma tumau.
O le P-type doping i totonu o matou SiC wafers e faʻamautinoa le faʻaleleia atili o le eletise ma le feʻaveaʻi o le avega. Ole mea lea e fa'apitoa ai mo fa'aoga ile eletise eletise, LED, ma sela photovoltaic, lea e maualalo ai le eletise ma maualuga le lelei e taua tele.
O lo'o gaosia ma tulaga maualuga o le sa'o ma le lelei, Semicera's P-ituaiga SiC wafers e ofoina atu le tutusa lelei o luga ma fa'aitiitia fua fa'aletonu. O nei uiga e taua tele mo alamanuia e manaʻomia ai le tumau ma le faʻamaoni, e pei o le aerospace, taʻavale, ma malosiaga faʻafouina.
O le tautinoga a Semicera i mea fou ma le lelei o loʻo faʻaalia i la matou P-type SiC Substrate Wafer. E ala i le tu'ufa'atasia o nei mea'ai i lau fa'agasologa o le gaosiga, e te fa'amautinoa ai e fa'amanuiaina au masini mai le fa'apitoa o le vevela ma le eletise o le SiC, e mafai ai ona fa'agaoioia lelei i lalo o tulaga lu'itau.
Fa'afaigaluegaina i le Semicera's P-type SiC Substrate Wafer o lona uiga o le filifilia o se oloa e tu'ufa'atasia ai mea fa'asaienisi fa'aonaponei ma fa'ainisinia ma'oti. Semicera e fa'amaoni i le lagolagoina o le isi augatupulaga o tekinolosi fa'aeletoroni ma optoelectronic, tu'uina atu vaega taua e mana'omia mo lou manuia i le semiconductor industry.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
