Fa'atomuaga o le wafer carrier
VAEGA FA'AVAE
▶Faiga o le Wafer Carrier mo le PECVD & TALOX Process
• Va'a PECVD & TALOX Graphite (M4~M12)
• Va'a SM Tu'usa'o (M4, M6)
• Fa'ato'a & ta'ele Vaega Graphite (M4~M6)
• Fata C/C & Fa'afuifu Sima
• U'amea RIE-Tray & Fa'a'umea Sima
• Fa'amau fa'amau : O-Ring & SQ-Ring
▶Fa'agasologa Fa'aliliuga Fa'asilasilaga & Susū
• LSC H-Carrier poo kaseti (M4~M12)
• LSC V-Carrier poo kaseti (M4~M12)
• ASC Carrier poo kaseti (M4, M6)
• W/F Pusa & Pusa Teuina (M4~M12)
• Fa'asologa o Uili (Roller).
▶Lave Cell La & Ave u'amea
• TRC Carrier poo kaseti (M4~M12)
• Mekasini (e iai BELT)
VAA GRAPHITE (I-ituaiga-H)
19P6-216CT (WF M4~M12)
VAA GRAPHITE (I-ituaiga-H)
21P6-240CT WF M4~M12)
VAA GRAPHITE (I-ituaiga-H)
23P7-308CT(W/F M4~M12)
VAA GRAPHITE (I-ituaiga-H)
22P/7-294TP (W/F M4~M12)
VAA GRAPHITE (I-ituaiga-H)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF LA'U MA LE PUSA TE'U (~M12)
C/C FAITAU po'o LE FA'AVAE (M4~M10)
C/C FAITAU po'o LE FA'AVAE (M4~M10)
VA'A TU'U (SM) M6
LSC-H-VAVE(~M12)
LSC-V-VAVE(~M12)
ASC CARRIER (~M6)
TRC AVEA(~M12)
TRC AVEA(~M12)
VAA GRAPHITE(M12)
Faiga o le Wafer Carrier mo le PECVD Process
▶ VA'A GRAPHITE (CT-Designed) M10/M12 Fa'agasologa
• MANATU FAAVAE FAAPITOA
▶ VAA GRAPHITE (CT-Designed) M4/M6 Fa'agasologa
▶ VA'A Vaega Fesoasoani
▶ VA'A FA'ATA'U-161.7mm WAFER
▶ VA'A FA'AVAE FA'ASA'E-166mm WAFER
▶ VA'A FA'AVAE FA'AVAE-161.7mm, 166mm WAFER
Lave Cell La & Metal TRC Ave
ITIGA : Otometi
LAITI WAFLE : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
FA'A'OGA: Ave (Kaseti)
AGAFAI: 100 pepa
PITCH: 4.76MM/5.953mm/6.35mm
TULAFONO: Pe tusa 559×220×220MM
Pe tusa 712×260×260MM
TULAGA : Siosiomaga
MEA FAI: AFI, PALA IA-Alumi (anodizing)
ITU PILI-POM (Atistatic)
Ufiufi o le pa pito i lalo-EPDM/PU/VITON (ASE)
TRC-METAL CARIER (U'SER LINE)
TRC-METAL CARIER (U'SER LINE)
TRC-METAL CARIER (U'SER LINE)
PALIU FA'A'ALI & FA'ATOTO, FA'AVAE
