Semiceraua fiafia e ofoina atu leKaseti PFA, o se filifiliga fa'apitoa mo le fa'aogaina o le wafer i totonu o si'osi'omaga o lo'o fa'asilisili ai le tete'e o vaila'au ma le tumau. Fausia mai le maualuga-mama Perfluoroalkoxy (PFA) mea, o lenei kaseti ua mamanuina e tatalia tulaga sili ona faigata i le semiconductor fabrication, faʻamautinoa le saogalemu ma le faʻamaoni o au wafers.
Tete'e Vailaau Fa'atusaO leKaseti PFAua fa'ainisinia e maua ai le tete'e sili atu i le tele o vaila'au, ma avea ai ma filifiliga lelei mo faiga e aofia ai vaila'au fa'amalosi, solvents, ma isi vaila'au malosi. O le malosi malosi lea o vaila'au e fa'amautinoa ai o lo'o tumau pea le kaseti ma galue e o'o lava i si'osi'omaga sili ona pala, ma fa'ateleina ai lona ola ma fa'aitiitia ai le mana'omia mo le sui soo.
Fausia-Mama maualugaSemicera'sKaseti PFAe gaosia mai mea PFA ultra-mama, lea e taua tele i le puipuia o le faʻaleagaina i le taimi o le gaosiga o wafer. O lenei faufale maualuga-mama e fa'aitiitia ai le a'afiaga o le fa'atupuina o fasimea ma le fa'amama kemisi, fa'amautinoa o lo'o puipuia au fa'ama'i mai mea leaga e ono fa'aleagaina ai lo latou lelei.
Faʻaleleia le Tumau ma FaʻatinogaFuafuaina mo le tumau, leKaseti PFAfa'atumauina lona fa'atonuga fa'atulagaina i lalo o le vevela tele ma tulaga fa'agaoioiga faigata. Pe faʻaalia i le maualuga o le vevela pe faʻafeiloaʻi i le faʻaaogaina faifaipea, o lenei kaseti e tumau pea lona foliga ma le faʻatinoga, ofoina atu le faʻatuatuaina umi i le manaʻomia o siosiomaga gaosiga.
Sa'o Inisinia mo le Saogalemu TaulimaO leSemicera PFA Kasetifa'aalia fa'ainisinia sa'o e fa'amautinoa ai le saogalemu ma le mautu o le tagofiaina o wafer. Ua mamanuina ma le faaeteete avanoa ta'itasi e taofi mau ai ma fa'amau lelei i totonu, puipuia ai so'o se gaioiga po'o se suiga e ono fa'aleagaina. O lenei inisinia sa'o e lagolagoina le tu'u sa'o ma le fa'apipi'i, e saofagā i le fa'atinoina o le fa'agasologa atoa.
Talosaga Fetuuna'i i Fa'agasologaFaʻafetai i ona mea faʻapitoa faʻapitoa, o leKaseti PFAe lava le fa'aogaina e fa'aoga i vaega eseese o le gaosiga semiconductor. E sili ona fetaui lelei mo le susū susū, vaila'au va'a (CVD), ma isi fa'agasologa e a'afia ai si'osi'omaga o vaila'au malosi. O lona fetuutuuna'i ua avea ai ma meafaigaluega taua i le faatumauina o le amiosa'o o le faagasologa ma le lelei o le wafer.
Tautinoga i Tulaga Lelei ma Faiga FouI Semicera, matou te tuuto atu i le tuʻuina atu o oloa e fetaui ma tulaga maualuga o alamanuia. O leKaseti PFAfa'ata'ita'iina lenei tautinoga, ofoina atu se tali fa'atuatuaina e tu'ufa'atasia lelei i au faiga gaosiga. O kaseti ta'itasi o lo'o fa'atinoina le fa'atonuga lelei ina ia mautinoa e fetaui ma a tatou fa'ata'ita'iga malosi, fa'aolaina le tulaga lelei e te fa'amoemoeina mai Semicera.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Fa'a tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amamafa | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
