RTP CVD SiC Ring

Fa'amatalaga Puupuu:

O mama RTP CVD SiC e masani lava ona faia i le silicon carbide (SiC), o lona vailaʻau vailaʻau ma le fausaga tioata e maua ai le lelei tele. Silicon carbide o se mea sima e maualuga le liusuavai, maualuga le maaa ma sili ona lelei le faʻafefe. O lo'o fa'aalia ai le lelei o le vevela ma le mautu o vaila'au i le maualuga o le vevela, ma e sili atu le malosi fa'ainisinia ma le ofuina o le tete'e.

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Fa'amatalaga Oloa

Faailoga o oloa

Aisea e fai ai le Silicon Carbide Etching Ring?

RTPCVD SiC mamae fa'aaogaina lautele i alamanuia ma fanua faasaienisi i le vevela maualuga ma siosiomaga corrosive. E faia se sao taua i le gaosiga o semiconductor, optoelectronics, masini saʻo ma alamanuia vailaʻau. O talosaga fa'apitoa e aofia ai:

1. Semiconductor gaosiga:RTP CVD SiC mamae mafai ona faʻaaogaina mo le faʻamafanafanaina ma le faʻamafanafanaina o masini semiconductor, tuʻuina atu le faʻamautuina o le vevela ma faʻamautinoa le saʻo ma le tumau o le faagasologa.

2. Optoelectronics: Ona o lona faʻaleleia lelei o le vevela ma le maualuga o le vevela, RTPCVD SiC mamae mafai ona faʻaaogaina e fai ma lagolago ma mea faʻamalo vevela mo lasers, mea faʻaoga fesoʻotaʻiga fiber optic ma mea faʻapitoa.

3. Masini saʻo: RTP CVD SiC mama e mafai ona faʻaogaina mo mea faʻapitoa ma meafaigaluega i le maualuga o le vevela ma le faʻaleagaina o siosiomaga, e pei o ogaumu vevela maualuga, masini masini ma vailaʻau kemisi.

4. Alamanuia vailaʻau: Ona o le faʻamaʻiina o le corrosion ma le mautu o vailaʻau, e mafai ona faʻaogaina mama RTP CVD SiC i totonu o koneteina, paipa ma reactors i vailaʻau faʻamaʻi ma gaioiga catalytic.

Epi System

RTP System

Faiga CVD

Fa'atinoga o oloa:

1. Faʻafeiloaʻi le faagasologa i lalo ole 28nm

2. Super corrosion tetee

3. Super mama faatinoga

4. Super maaa

5. maualuga maualuga

6. Tete'e maualuga vevela

7. La'ei tete'e

Fa'aoga oloa:

Silicon carbide mea o loʻo i ai uiga o le maualuga o le maʻaʻa, faʻaofuofu teteʻe, faʻamaʻi faʻamaʻi ma le maualuga o le vevela. O oloa e sili ona lelei le fa'atinoga o lo'o fa'aaogaina lautele i faiga fa'agogo ma TF/Diffusion.