Semicerafaailoa atu leKaseti Semiconductor, o se meafaigaluega taua mo le saogalemu ma le lelei o le taulimaina o wafers i le faagasologa o le gaosiga o le semiconductor. Fa'ainisinia ma le sa'o maualuga, o lenei kaseti e fa'amautinoaina o lo'o teuina lelei ma felauaiga au masi, fa'atumauina lo latou fa'amaoni i la'asaga uma.
Puipuiga Sili ma le MaumauO leKaseti Semiconductormai Semicera ua fausia e ofoina atu le puipuiga aupito maualuga i au wafers. Fausia mai mea malolosi, fa'ama'i fa'ama'i, e puipuia ai au fa'ama'i mai mea e ono fa'aleagaina ma fa'aleagaina, ma avea ai ma filifiliga lelei mo si'osi'omaga potu mama. O le mamanu a le kaseti e fa'aitiitia ai le fa'atupuina o ma'ele'ele ma fa'amautinoa o lo'o tumau pea le le pa'i ma fa'asao ma fa'asao a'o felauaiga ma felauaiga.
Fuafuaga Fa'aleleia mo Fa'atinoga LeleiSemicera'sKaseti Semiconductoro lo'o fa'aalia ai se mamanu fa'ainisinia ma'oti e maua ai le fa'aoga sa'o o le wafer, fa'aitiitia ai le fa'aletonu ma le fa'aleagaina o masini. O avanoa o le kaseti o lo'o va'aia lelei e taofi mau ai masi masi ta'itasi, e puipuia ai so'o se gaioiga e ono i'u ai i le maosiosia po'o isi fa'aletonu.
Fetuuna'i ma FegalegaleaigaO leKaseti Semiconductore fegalegaleai ma fetaui ma le tele o wafer eseese, e talafeagai mo laʻasaga eseese o semiconductor fabrication. Pe o lo'o e galue fa'atasi ma fua fa'amama fa'aleaganu'u masani, o lenei kaseti e fa'afetaui i ou mana'oga, e ofoina atu ai le fetu'una'i i au faiga gaosiga.
Fa'afaigofieina le Taulimaina ma le LeleiFuafuaina ma le tagata e faaaogāina i le mafaufau, leSemicera Semiconductor Kasetie mama ma faigofie ona taulimaina, e mafai ai ona vave ma lelei le utaina ma le la'u ese. O lenei mamanu ergonomic e le gata e sefe ai le taimi ae faʻaitiitia ai le lamatiaga o le sese o tagata, faʻamautinoaina le sologa lelei o gaioiga i totonu o lau fale.
Faʻafeiloaʻi Tulaga Faʻavae AlamanuiaSemicera fa'amautinoa o leKaseti Semiconductorausia tulaga maualuga o alamanuia mo le lelei ma le faʻamaoni. O kaseti ta'itasi e faia ni su'ega fa'amalosi e fa'amautinoa ai o lo'o fa'atinoina pea i lalo o tulaga mana'omia ole gaosiga semiconductor. O lenei fa'amaoni i le lelei e fa'amautinoa ai o lo'o puipuia i taimi uma au wafers, fa'atumauina tulaga maualuga e mana'omia ile alamanuia.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
