Graphite Susceptor ma Silicon Carbide Coating 8 inisi wafer Carrier

CVD-SiC faʻapipiʻio loʻo i ai uiga o le faʻatulagaga tutusa, mea faʻapipiʻi, maualuga le vevela, faʻamaʻi faʻamaʻi, mama maualuga, faʻamaʻi faʻamaʻi ma alkali ma reagent, faʻatasi ai ma mea faʻaletino ma vailaʻau.
 
Pe a faatusatusa i mea graphite maualuga-mama, e amata ona oxidize graphite i le 400C, lea o le a mafua ai le leiloa o le paʻu ona o le oxidation, e mafua ai le faaleagaina o le siosiomaga i masini peripheral ma potu gaogao, ma faateleina ai le mama o le siosiomaga mama-maualuga.
Peitai,SiC fa'apipi'imafai ona faatumauina le mautu faaletino ma vailaau i le 1600 tikeri, E masani ona faʻaaogaina i alamanuia faʻaonapo nei, aemaise lava i alamanuia semiconductor.