PSS fa'amomoli fa'amomoli mo le fa'asalalauina o le semiconductor wafer

Fa'amatalaga Puupuu:

Silicon carbide o se ituaiga fou o sima ma maualuga tau faʻatinoga ma mea sili ona lelei. Ona o foliga e pei o le malosi maualuga ma le maʻaʻa, maualuga le vevela o le vevela, le tele o le vevela ma le faʻamaʻiina o vailaʻau, Silicon Carbide e toetoe lava a mafai ona tatalia uma vailaʻau. O le mea lea, o le SiC e faʻaaogaina lautele i le suauʻu suauʻu, vailaʻau, masini ma vaalele, e oʻo lava i le malosi faaniukilia ma le militeli o loʻo i ai a latou manaʻoga faʻapitoa ile SIC. O nisi faʻaoga masani e mafai ona matou ofoina atu o mama faʻamaufaʻailoga mo pamu, valve ma le ofutau puipui ma isi.

E mafai ona matou mamanuina ma gaosia e tusa ai ma au fua faʻapitoa ma le lelei lelei ma le taimi e tuʻuina atu ai.


Fa'amatalaga Oloa

Faailoga o oloa

Fa'amatalaga o oloa

O la matou kamupani e tuʻuina atu auaunaga faʻapipiʻi SiC e ala i le auala CVD i luga o le graphite, ceramics ma isi mea, ina ia mafai ai e kasa faʻapitoa o loʻo i ai carbon ma silicon ona tali atu i le maualuga o le vevela e maua ai le mama maualuga SiC mole, molelaʻau teuina i luga o mea faʻapipiʻi, fa'atūina le SIC fa'apipi'i puipui.

Vaega autu:

1. maualuga le vevela oxidation tetee:

o loʻo lelei tele le faʻamaʻiina o le faʻamaʻi pe a maualuga le vevela ile 1600 C.

2. maualuga le mama: faia e vailaau ausa tuu i lalo o le maualuga vevela tulaga chlorination.

3. Erosion tete'e: maualuga ma'a'a, fa'apipi'i luga, vaega laiti.

4. Tete'e a'a: acid, alkali, masima ma organic reagents.

Fa'amatalaga autu o le CVD-SIC Coating

SiC-CVD Meatotino

Fauga tioata

FCC β vaega

Malosi

g/cm ³

3.21

Malosi

Vickers maaa

2500

Tele o Saito

μm

2~10

Vailaau Mama

%

99.99995

Malosiaga vevela

J·kg-1 ·K-1

640

Sulimation Temperature

2700

Malosi Felexural

MPa (RT 4-point)

415

Young's Modulus

Gpa (4pt pi'o, 1300℃)

430

Fa'alauteleina o le vevela (CTE)

10-6K-1

4.5

Fa'avevela vevela

(W/mK)

300

Semicera Nofoaga faigaluega
Semicera fale faigaluega 2
Meafaigaluega masini
CNN faʻagaioiga, vailaʻau faʻamamaina, faʻapipiʻi CVD
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