Semicera's Silicon Nitride Ceramic Substrate o lo'o fa'atusalia ai le tumutumuga o mea fa'atekonolosi fa'atekonolosi fa'apitoa, e tu'uina atu ai le fa'aogaina o le vevela ma mea fa'ainisinia malosi. Fa'ainisinia mo fa'aoga maualuga, o lenei mea e sili atu ona lelei i si'osi'omaga e mana'omia ai le fa'alagolagoina o le fa'aogaina o le vevela ma le fa'ata'atiaga lelei.
O a matou Silicon Nitride Ceramic Substrates ua mamanuina e tetee atu ai i le vevela vevela ma tulaga faigata, ma avea ai ma mea lelei mo masini eletise maualuga ma maualuga. O lo latou fa'auluuluina o le vevela e fa'amautinoa ai le fa'amama lelei o le vevela, lea e taua tele mo le fa'atumauina o le fa'atinoga ma le umi o mea fa'aeletoroni.
O le tautinoga a Semicera i le lelei o loʻo faʻaalia i Silicon Nitride Ceramic Substrate matou te gaosia. O mea'ai ta'itasi e gaosia i le fa'aogaina o faiga fa'aonaponei e fa'amautinoa ai le fa'atinoina faifaipea ma fa'aletonu laiti. O lenei tulaga maualuga o le sao atoatoa e lagolagoina ai manaoga faigata o alamanuia e pei o taavale afi, vaalele, ma fesootaiga.
I le faʻaopoopoga i a latou faʻamafanafanaga ma masini faʻainisinia, o matou substrate e ofoina atu mea faʻapitoa eletise eletise, lea e fesoasoani i le faʻatuatuaina atoa o au masini eletise. E ala i le fa'aitiitia o le fa'alavelave fa'aeletise ma le fa'aleleia atili o le mautu, Semicera's Silicon Nitride Ceramic Substrates e taua tele i le fa'amalieina o le fa'atinoga o masini.
Filifilia o le Semicera's Silicon Nitride Ceramic Substrate o lona uiga o le teu faafaigaluegaina i se oloa e maua uma ai le faatinoga maualuga ma le tumau. O matou mea'ai e fa'ainisinia e fa'afetaui mana'oga o fa'aoga fa'aeletoroni fa'aeletonika, fa'amautinoaina o lo'o fa'amanuiaina au masini mai tekinolosi fa'aonaponei fa'aonaponei ma le fa'atuatuaina fa'apitoa.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
