Semicera's Silicon On Insulator (SOI) Wafer o loʻo taʻimua i le faʻafouina o le semiconductor, ofoina atu le faʻaleleia o le eletise eletise ma le maualuga o le faʻaogaina o le vevela. O le fausaga o le SOI, o lo'o i ai se fa'amea manifinifi silikoni i luga o se mea fa'apipi'i, e maua ai fa'amanuiaga taua mo masini fa'aeletonika maualuga.
Ua mamanuina a matou wafers SOI e faʻaitiitia ai le malosi o le parasitic ma le leakage, lea e manaʻomia mo le atinaʻeina o fesoʻotaʻiga tuʻufaʻatasia maualuga ma maualalo. O lenei tekinolosi faʻaonaponei e faʻamautinoaina e sili atu le faʻaogaina o masini, faʻatasi ai ma le faʻaleleia atili o le saoasaoa ma faʻaitiitia le faʻaaogaina o le malosi, e taua tele mo mea faʻaonaponei faʻaeletoroni.
O fa'agaioiga fa'agasologa o gaosiga o lo'o fa'aaogaina e Semicera e fa'amautinoa ai le gaosiga o fa'ama'i so'o so'o fa'atasi ma le fa'alelei lelei. E taua tele lenei tulaga lelei mo faʻaoga i fesoʻotaʻiga, taʻavale, ma mea tau eletise, lea e manaʻomia ai vaega faʻalagolago ma maualuga.
I le faaopoopo atu i latou aoga eletise, Semicera's SOI wafers e ofoina atu le maualuga o le vevela, faʻaleleia le vevela ma le mautu i masini maualuga ma maualuga. O lenei vaega e sili ona taua i faʻaoga e aofia ai le tele o le vevela ma manaʻomia le pulea lelei o le vevela.
E ala i le filifilia o le Semicera's Silicon On Insulator Wafer, e te teu fa'afaigaluega i se oloa e lagolago ai le alualu i luma o tekinolosi fa'aonaponei. O la matou tautinoga i le lelei ma le faʻafouina e faʻamautinoa ai o matou SOI wafers e fetaui ma manaʻoga faigata o pisinisi semiconductor i aso nei, e maua ai le faʻavae mo masini eletise e sosoo ai.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
