Silicon i luga ole Insulator Wafersmai Semicera ua mamanuina e faʻafetaui ai le faʻatupulaia o le manaʻoga mo fofo semiconductor maualuga. O matou SOI wafers e ofoina atu le maualuga o le eletise ma faʻaititia le malosi o masini parasitic, faʻapena lelei mo talosaga faʻapitoa e pei o masini MEMS, masini, ma fesoʻotaʻiga tuʻufaʻatasia. O le poto masani a Semicera i le gaosiga o wafer e faʻamautinoa ai e taʻitasiSOI wafere maua ai fa'ai'uga fa'atuatuaina, maualuga lelei mo au mana'oga fa'atekonolosi e sosoo ai.
O tatouSilicon i luga ole Insulator Wafersofo atu se paleni sili ona lelei i le va o le tau-lelei ma le faʻatinoga. Faatasi ai ma le tau faʻatauvaʻa soi ua faʻateleina le tauvaga, o nei wafers ua faʻaaogaina lautele i le tele o alamanuia, e aofia ai microelectronics ma optoelectronics. Ole fa'agaioiga fa'akomepiuta maualuga a Semicera e fa'amaonia ai le fa'amauina ma le tutusa lelei, ma fa'aaogāina ai mo fa'aoga eseese, mai le cavity SOI wafers e o'o ile silicon wafers.
Vaega Autu:
•Fa'atosina SOI sili ona lelei mo fa'atinoga i MEMS ma isi fa'aoga.
•Tau fa'atauva soi wafer mo pisinisi o lo'o sailia ni fofo fa'apitoa e aunoa ma le fa'afefeteina o le lelei.
•Lelei mo tekinolosi faʻaonaponei, ofoina atu faʻaleleia eletise tuʻueseeseina ma le lelei ile silikoni i luga ole insulator system.
O tatouSilicon i luga ole Insulator Wafersua fa'ainisinia e tu'uina atu fofo maualuga, lagolagoina le isi galu o mea fou i tekinolosi semiconductor. Pe o e galue ile luaSOI wafers, MEMS masini, poʻo le silikoni i luga o vaega insulator, Semicera e tuʻuina atu faʻamaʻi e fetaui ma tulaga maualuga i le alamanuia.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Fa'a tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amamafa | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
