Semicera Silicon Substrates ua mamanuina e faʻafetaui ai manaʻoga faigata o le semiconductor alamanuia, ofoina atu le mafaatusalia lelei ma saʻo. O nei substrates e maua ai se faʻavae faʻalagolago mo faʻaoga eseese, mai taʻaloga tuʻufaʻatasia i sela photovoltaic, faʻamautinoa le lelei o le faʻatinoga ma le umi o le ola.
O le maualuga o le mama o Semicera Silicon Substrates e faʻamautinoa ai le laʻititi o faʻaletonu ma le maualuga o le eletise, e taua tele mo le gaosiga o mea eletise eletise. O lenei tulaga o le mama e fesoasoani i le faʻaitiitia o le malosi ma le faʻaleleia atili o le lelei atoatoa o masini semiconductor.
O lo'o fa'aogaina e Semicera faiga fa'aonaponei fa'aonaponei e gaosia ai mea'ai silikoni fa'atasi ma tulaga fa'apitoa ma mafolafola. O lenei sa'o e mana'omia mo le ausiaina o taunu'uga faifaipea i le fa'atupu semiconductor, lea e o'o lava i sina suiga itiiti e mafai ona a'afia ai le fa'atinoga o masini ma fua.
E maua i le tele o lapopoa ma faʻamatalaga, Semicera Silicon Substrates faʻafeiloaʻi le tele o manaʻoga tau pisinisi. Pe o lo'o e atina'eina microprocessors po'o paneta sola, o nei mea e maua ai le fetuutuunai ma le fa'amaoni e mana'omia mo lau fa'aoga patino.
Semicera o loʻo tuʻufaʻatasia i le lagolagoina o faʻafouga ma le lelei i totonu o pisinisi semiconductor. E ala i le tuʻuina atu o meaʻai silicon maualuga, matou te mafai ai e tagata gaosi oloa ona tuleia tuaoi o tekinolosi, tuʻuina atu oloa e fetaui ma manaoga faʻaleleia o le maketi. Fa'atuatuaina Semicera mo au fa'ato'aga fa'aeletonika ma fa'afofoga photovoltaic.
Aitema | Gaosiga | Suesuega | Faafoliga |
Fa'a tioata | |||
Polytype | 4H | ||
Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
Fa'aeletise Parata | |||
Fa'amamafa | n-ituaiga Nitrogen | ||
Tete'e | 0.015-0.025ohm·cm | ||
Fa'ailoga Fa'ainisinia | |||
Diamita | 150.0±0.2mm | ||
mafiafia | 350±25 μm | ||
Primary flat orientation | [1-100]±5° | ||
Muamua mafolafola umi | 47.5±1.5mm | ||
Lua mafolafola | Leai | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Fauga | |||
Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Uamea eleelea | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Tulaga Luma | |||
Luma | Si | ||
Fa'ai'uga luga | Si-foliga CMP | ||
fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
Faailoga leisa pito i luma | Leai | ||
Tulaga Tulaga | |||
Fa'ai'u tua | C-foliga CMP | ||
Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
faaletonu i tua | Leai | ||
Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
pito | |||
pito | Chamfer | ||
afifiina | |||
afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
*Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. |