Semicera Silicon Wafers o lo'o faia ma'oti e fai ma fa'avae mo le tele o masini semiconductor, mai microprocessors i photovoltaic cell. O nei wafers ua fa'ainisinia i le maualuga maualuga ma le mama, fa'amautinoa le fa'atinoina lelei i fa'aoga fa'aeletoroni eseese.
O lo'o gaosia e fa'aaoga ai metotia fa'amata'aga, Semicera Silicon Wafers e fa'aalia ai le tulaga fa'apitoa ma le tutusa, lea e taua tele mo le ausiaina o fua maualuga i le gaosiga semiconductor. O lenei tulaga o le saʻo e fesoasoani i le faʻaitiitia o faʻaletonu ma faʻaleleia atili le lelei atoatoa o vaega eletise.
Ole tulaga maualuga ole Semicera Silicon Wafers o loʻo faʻaalia i o latou uiga eletise, lea e saofagā i le faʻaleleia atili o masini semiconductor. Faatasi ai ma le maualalo o tulaga le mama ma maualuga tioata, o nei wafers e maua ai le tulaga lelei mo le atinaʻeina o mea tau eletise maualuga.
E maua i lapopoa eseese ma faʻamatalaga, Semicera Silicon Wafers e mafai ona faʻafetaui e faʻafetaui manaoga faʻapitoa o pisinisi eseese, e aofia ai komepiuta, fesoʻotaʻiga, ma le malosi faʻafouina. Pe mo gaosiga tetele po'o su'esu'ega fa'apitoa, o nei wafers e maua ai taunu'uga fa'atuatuaina.
Semicera ua tuuto atu i le lagolagoina o le tuputupu aʻe ma le faʻafouina o le semiconductor industry e ala i le tuʻuina atu o faʻamaʻi silikoni maualuga e fetaui ma tulaga maualuga o alamanuia. Faatasi ai ma le taulai atu i le saʻo ma le faʻamaoni, Semicera e mafai ai e tagata gaosi oloa ona tuleia tuaoi o tekinolosi, faʻamautinoa o latou oloa e tumau i luma o le maketi.
Aitema | Gaosiga | Suesuega | Faafoliga |
Fa'a tioata | |||
Polytype | 4H | ||
Fa'asagaga i luga ole mea sese | <11-20 >4±0.15° | ||
Fa'aeletise Parata | |||
Fa'amamafa | n-ituaiga Nitrogen | ||
Tete'e | 0.015-0.025ohm·cm | ||
Fa'ailoga Fa'ainisinia | |||
Diamita | 150.0±0.2mm | ||
mafiafia | 350±25 μm | ||
Primary flat orientation | [1-100]±5° | ||
Muamua mafolafola umi | 47.5±1.5mm | ||
Lua mafolafola | Leai | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Fauga | |||
Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Uamea eleelea | ≤5E10atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Tulaga Luma | |||
Luma | Si | ||
Fa'ai'uga luga | Si-foliga CMP | ||
fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
Faailoga leisa pito i luma | Leai | ||
Tulaga Tulaga | |||
Fa'ai'u tua | C-foliga CMP | ||
Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
faaletonu i tua | Leai | ||
Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
pito | |||
pito | Chamfer | ||
afifiina | |||
afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
*Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. |