Semicera's SiN Ceramics Plain Substrates e maua ai se fofo maualuga mo le tele o mea faʻaeletoroni ma fale gaosi oloa. E lauiloa mo le lelei tele o le vevela ma le malosi faʻainisinia, o nei mea e faʻamautinoa ai le faʻatuatuaina o le faʻaogaina i siosiomaga faigata.
O matou SiN (Silicon Nitride) ceramics ua mamanuina e taulimaina ai le vevela ogaoga ma tulaga maualuga-faʻalavelave, faʻapena ona talafeagai mo eletise eletise ma masini semiconductor maualuga. O lo latou tumau ma le tete'e atu i le fa'ate'ia o le vevela e lelei ai mo le fa'aoga i fa'aoga e taua tele ai le fa'atuatuaina ma le fa'atinoga.
Ole fa'agasologa ole gaosiga sa'o a Semicera e fa'amautinoaina ole fa'amalieina ole mea'ai ta'itasi ta'itasi tulaga fa'ata'atia lelei. O le mea lea e maua ai substrates e tutusa le mafiafia ma le tulaga lelei o luga, lea e taua mo le ausiaina o galuega sili ona lelei i faʻapotopotoga faʻaeletoroni ma faiga.
I le fa'aopoopoina i latou fa'alelei ma mea fa'ainisinia, SiN Ceramics Plain Substrates e ofoina atu mea lelei fa'amama eletise. Ole mea lea e fa'amautinoa ai le fa'alavelave tau eletise ma fesoasoani i le mautu atoa ma le lelei o vaega fa'aeletoroni, fa'aleleia atili ai le ola fa'atino.
E ala i le filifilia o Semicera's SiN Ceramics Plain Substrates, o lo'o e filifilia se oloa e tu'ufa'atasia fa'asaienisi meafaitino maualuluga ma le gaosiga maualuga. O la matou tautinoga i le tulaga lelei ma le faʻafouina e faʻamaonia ai e te mauaina mea e fetaui ma tulaga maualuga o alamanuia ma lagolagoina le manuia o au poloketi faʻatekonolosi.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
