Semicera's SOI Wafer (Silicon On Insulator) ua mamanuina e tuʻuina atu le faʻaesea eletise sili atu ma le faʻaogaina o le vevela. O lenei fausaga fou o le wafer, e faʻaalia ai le silicon layer i luga o le insulating layer, faʻamautinoaina le faʻaleleia atili o le masini ma faʻaitiitia le faʻaogaina o le eletise, ma faʻamaonia ai mo le tele o faʻaoga tekonolosi.
O matou SOI wafers e ofoina atu faʻamanuiaga faʻapitoa mo taʻaloga tuʻufaʻatasia e ala i le faʻaitiitia o le malosi o le parasitic ma faʻaleleia le saoasaoa ma le lelei o masini. E taua tele lenei mea mo mea fa'aonaponei fa'aeletonika, lea e mana'omia ai le maualuga o le fa'atinoga ma le fa'aleleia o le malosi mo fa'atauga ma fa'aoga tau alamanuia.
O lo'o fa'aaogaina e Semicera ni faiga fa'apitoa tau gaosiga e maua mai ai soi wafers ma le lelei ma le fa'amaoni. O nei wafers e tuʻuina atu ai le faʻaogaina o le vevela sili ona lelei, e faʻaoga lelei ai mo le faʻaogaina i totonu o siosiomaga e faʻafefe ai le vevela o se popolega, e pei o le maualuga o masini eletise ma le puleaina o le eletise.
O le fa'aogaina o soi wafers i le semiconductor fabrication e mafai ai ona fa'atupuina mea laiti, vave, ma sili atu ona fa'atuatuaina. O le tautinoga a Semicera i le fa'ainisinia sa'o e fa'amautinoa ai e ausia e a tatou wafers SOI tulaga maualuga e mana'omia mo tekonolosi fa'aonaponei i matā'upu e pei o feso'ota'iga, ta'avale, ma mea fa'akomepiuta fa'atau.
Filifilia o le Semicera's SOI Wafer o lona uiga o le teu fa'afaigaluegaina i se oloa e lagolago ai le fa'agasolo i luma o tekinolosi fa'aeletonika ma microelectronic. O a matou wafers ua mamanuina e tuʻuina atu ai le faʻaleleia atili o le faʻatinoga ma le tumau, e saofagā i le manuia o au galuega faʻatekonolosi maualuga ma faʻamautinoa e te tumau i le pito i luma o mea fou.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Fa'a tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Tua talatala | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
