Tantalum carbide (TaC) Susceptor Ufiufi mo Mea Epitaxy

Fa'amatalaga Puupuu:

O le graphite o se mea e sili ona lelei le vevela, ae e faigofie ona faʻamaʻiina i le maualuga o le vevela. E oo lava i totonu o ogaumu gaogao ma le kasa inert, e mafai lava ona oʻo i le faʻamaʻiina lemu. O le fa'aogaina o le CVD tantalum carbide (TaC) fa'apipi'i e mafai ona puipuia lelei ai le graphite substrate, e maua ai le maualuga-maualuga tete'e tutusa ma graphite. O le TaC fo'i o se mea e le fa'aogaina, o lona uiga e le tali atu i kasa e pei o le argon po'o le hydrogen i le maualuga o le vevela.Su'esu'ega Tantalum carbide (TaC) Susceptor Ufiufi mo Mea Epitaxy nei!

 

 


Fa'amatalaga Oloa

Faailoga o oloa

Semicera e tuʻuina atu faʻapitoa tantalum carbide (TaC) coatings mo vaega eseese ma ave.Semicera taʻitaʻia faiga faʻapipiʻiina e mafai ai e tantalum carbide (TaC) coatings ona ausia le mama maualuga, maualuga le maualuga o le vevela ma le maualuga o le faʻapalepale o vailaʻau, faʻaleleia le lelei o oloa o tioata SIC / GAN ma lapisi EPI (Susceptor TaC fa'apipi'i graphite), ma fa'alauteleina le ola o vaega autu o le reactor. O le faʻaogaina o le tantalum carbide TaC coating o le foia lea o le faʻafitauli pito ma faʻaleleia le lelei o le tuputupu aʻe tioata, ma o Semicera ua faʻataunuʻuina le tantalum carbide coating technology (CVD), e oʻo atu i le tulaga maualuga faavaomalo.

 

Ina ua mavae tausaga o atinae, ua manumalo Semicera le tekinolosi oCVD TaCfaatasi ai ma taumafaiga soofaatasi a le matagaluega R&D. O faaletonu e faigofie ona tupu i le faagasologa o le tuputupu ae o siC wafers, ae pe a uma ona faʻaaogainaTaC, e taua tele le eseesega. O loʻo i lalo se faʻatusatusaga o wafers ma e aunoa ma le TaC, faʻapea foʻi ma vaega o Simicera mo le tuputupu aʻe tioata tasi.

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faatasi ai ma le leai foi o le TaC

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Ina ua uma ona faaaoga TaC (taumatau)

E le gata i lea, o Semicera'sTaC-faʻapipiʻiina oloafaʻaalia le umi o le auaunaga ma le sili atu o le maualuga o le vevela faʻatusatusa iSiC coatings.O fua fa'asu'esu'e ua fa'aalia ai o le matouTaC coatingse mafai ona faatino i taimi uma i le vevela e oo atu i le 2300 tikeri Celsius mo vaitaimi faaumiumi. Lalo o nisi o faʻataʻitaʻiga oa matou faʻataʻitaʻiga:

 
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