TaC fa'apipi'io se mea taua faʻapipiʻi, lea e masani ona saunia i luga o se faʻavae graphite e uʻamea faʻaletino ausa vailaʻau (MOCVD) tekinolosi. O lenei faʻapipiʻi e iai mea sili ona lelei, e pei o le maualuga o le maʻaʻa, sili ona lelei le faʻaogaina o le ofuina, maualuga le vevela ma le faʻamautuina o vailaʻau, ma e talafeagai mo le tele o talosaga faʻainisinia maualuga.
O tekonolosi MOCVD ose tekinolosi fa'atupuina ata manifinifi e masani ona fa'aogaina e teu ai le ata fa'afefiloi e mana'omia i luga o le mea'ai e ala i le fa'afo'iina o u'amea fa'ameaola ma kasa fa'agaoioi ile vevela maualuga. Pe a sauniTaC fa'apipi'i, Filifilia o le u'amea talafeagai muamua ma puna kaponi, fa'atonutonu tulaga fa'afoliga ma fa'aputuga fa'amaufa'ailoga, se toniga ma mafiafia TaC ata tifaga e mafai ona teuina i luga o se fa'avae graphite.
Semicera e tuʻuina atu faʻapitoa tantalum carbide (TaC) coatings mo vaega eseese ma ave.Semicera taʻitaʻia faiga faʻapipiʻiina e mafai ai e tantalum carbide (TaC) coatings ona ausia le mama maualuga, maualuga le maualuga o le vevela ma le maualuga o le faʻapalepale o vailaʻau, faʻaleleia le lelei o oloa o tioata SIC / GAN ma lapisi EPI (Susceptor TaC fa'apipi'i graphite), ma fa'alauteleina le ola o vaega autu o le reactor. O le faʻaogaina o le tantalum carbide TaC coating o le foia lea o le faʻafitauli pito ma faʻaleleia le lelei o le tuputupu aʻe tioata, ma o Semicera ua faʻataunuʻuina le tantalum carbide coating technology (CVD), e oʻo atu i le tulaga maualuga faavaomalo.
Ina ua mavae tausaga o atinae, ua manumalo Semicera le tekinolosi oCVD TaCfaatasi ai ma taumafaiga soofaatasi a le matagaluega R&D. O faaletonu e faigofie ona tupu i le faagasologa o le tuputupu ae o siC wafers, ae pe a uma ona faʻaaogainaTaC, e taua tele le eseesega. O loʻo i lalo se faʻatusatusaga o wafers ma e aunoa ma le TaC, faʻapea foʻi ma vaega o Simicera mo le tuputupu aʻe tioata tasi.
faatasi ai ma le leai foi o le TaC
Ina ua uma ona faaaoga TaC (taumatau)
E le gata i lea, o Semicera'sTaC-faʻapipiʻiina oloafaʻaalia le umi o le auaunaga ma le sili atu o le maualuga o le vevela faʻatusatusa iSiC coatings.O fua fa'asu'esu'e ua fa'aalia ai o le matouTaC coatingse mafai ona faatino i taimi uma i le vevela e oo atu i le 2300 tikeri Celsius mo vaitaimi faaumiumi. Lalo o nisi o faʻataʻitaʻiga oa matou faʻataʻitaʻiga:
