Semicera o loʻo tuʻuina atu le taʻitaʻia o alamanuiaWafer Carriers, fa'ainisinia e tu'uina atu ai le puipuiga sili ma le felauaiga fa'alelei o ma'ale'ale semiconductor wafers i la'asaga 'ese'ese o le gaosiga. O tatouWafer Carriersua mamanuina ma'oti e fa'amalieina mana'oga fa'aonaponei semiconductor fa'aonaponei, fa'amautinoaina le fa'atumauina o le fa'amaoni ma le lelei o au wafers i taimi uma.
Vaega Autu:
• Fausia Mea Fa'apitoa:Faia mai mea e sili ona lelei, fa'ama'i fa'ama'i e fa'amautinoa ai le tumau ma le umi o le ola, e fa'amalieina mo si'osi'omaga potu mama.
•Fuafuaga sa'o:O lo'o iai le fa'aoga sa'o o le fa'aoga ma le fa'amautu o auala e taofia ai le pa'u ma le fa'aleagaina o le wafer i le taimi o le tagofiaina ma felauaiga.
•Feso'ota'iga tele:E fa'aogaina le tele o lapopo'a ma mafiafia, e mafai ai ona fetu'una'i mo fa'aoga semiconductor eseese.
•Taulimaga Ergonomic:Mama ma fa'aoga-fa'aoga mamanu fa'afaigofie le utaina ma le la'uina, fa'aleleia le lelei o le fa'agaioiga ma fa'aitiitia le taimi taulima.
•Filifiliga Fa'apitoa:E ofoina atu aganu'u e fa'amalieina mana'oga fa'apitoa, e aofia ai filifiliga meafaitino, fetuutuuna'i lapopo'a, ma fa'ailoga mo le fa'atumauina lelei o galuega.
Fa'aleleia lau fa'agasologa o le gaosiga o le semiconductor ma Semicera'sWafer Carriers, o le fofo lelei mo le puipuia o au wafers mai le faʻaleagaina ma le faʻaleagaina o masini. Talitonu i la matou tautinoga i le lelei ma le faʻafouina e tuʻuina atu oloa e le gata ina ausia ae sili atu i tulaga o alamanuia, faʻamautinoaina o au gaioiga e sologa lelei ma lelei.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
