Semicera folasia leWafer Cassette Carrier, o se vaifofo taua mo le saogalemu ma le lelei o le faʻaogaina o fasi semiconductor wafers. O lenei va'a ua fa'ainisinia e fa'amalieina mana'oga mamafa o le semiconductor industry, fa'amautinoaina le puipuiga ma le fa'amaoni o au wafers i le faagasologa o le gaosiga.
Vaega Autu:
•Malosi le fausiaina:O leWafer Cassette Carriere fausia mai mea e sili ona lelei, umi e fa'asagatau i faigata o siosiomaga semiconductor, e maua ai le puipuiga fa'atuatuaina mai le fa'aleagaina ma le fa'aleagaina o le tino.
•Fa'atonuga sa'o:Fuafuaina mo le fa'aoga sa'o, o lenei va'a e fa'amautinoaina o lo'o fa'amautu lelei fa'ama'i, fa'aitiitia ai le fa'aletonu po'o le fa'aleagaina i le taimi o felauaiga.
•Taulimaga faigofie:Ergonomically mamanuina mo le faigofie o le faʻaogaina, o le vaʻa faʻafaigofie le faʻapipiʻiina ma le laʻuina o le faʻagasologa, faʻaleleia le lelei o galuega i totonu o potu mama.
•Fegalegaleai:E fetaui lelei ma le tele o lapo'a ma ituaiga wafer, e mafai ai ona fa'aogaina mo manaoga eseese o le gaosiga o semiconductor.
Tofo i puipuiga e le mafaatusalia ma le faigofie ma Semicera'sWafer Cassette Carrier. Ua mamanuina la matou va'a ina ia ausia tulaga maualuga o le gaosiga o le semiconductor, fa'amautinoaina o lo'o tumau pea lau fa'ato'aga i le tulaga mama mai le amataga e o'o i le mae'a. Fa'atuatuaina Semicera e tu'uina atu le tulaga lelei ma le fa'amaoni e te mana'omia mo au faiga sili ona taua.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
