Semicera'sKaseti Waferose vaega taua i le faiga o le gaosiga o le semiconductor, ua fuafuaina e taofi mau ma felauaiga ma'ale'ale semiconductor wafers. O leKaseti Wafere maua ai se puipuiga fa'apitoa, ma fa'amautinoaina o lo'o fa'asa'olotoina ta'itasi masi mai mea leaga ma fa'aleagaina fa'aletino a'o tagofia, teuina, ma felauaiga.
Fausia i le maualuga-mama, mea faʻamaʻi faʻasaina, le SemiceraKaseti Waferfaʻamaonia le maualuga maualuga o le mama ma le tumau, e manaʻomia mo le tausisia o le faʻamaoni o wafers i laasaga uma o le gaosiga. O le fa'ainisinia sa'o o nei kaseti e mafai ai ona tu'ufa'atasia lelei ma faiga fa'a otometi, fa'aitiitia le lamatiaga o le fa'aleagaina ma le fa'aleagaina o masini.
O le mamanu o leKaseti Wafere lagolagoina foi le lelei o le ea ma le pulea o le vevela, lea e taua tele mo faiga e manaʻomia ai tulaga faʻapitoa o le siosiomaga. Pe faʻaaogaina i totonu o potu mama poʻo i le taimi o le vevela, o le SemiceraKaseti Waferua fa'ainisinia e fa'amalieina mana'oga mamafa o le semiconductor alamanuia, tu'uina atu fa'atuatuaina ma fa'aauau le fa'atinoga e fa'aleleia atili ai le gaosiga ma le lelei o oloa.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
