Blue/green LED epitaxy mai semicera e ofoina atu fofo pito sili ona lelei mo le gaosiga o LED maualuga. Fuafuaina e lagolago ai faagasologa alualu i luma epitaxial tuputupu aʻe, Semicera's Blue/green LED epitaxy tekinolosi faʻaleleia le lelei ma le saʻo i le gaosia o moli lanumoana ma lanu meamata, e taua tele mo faʻaoga optoelectronic eseese. Fa'aaogā fa'aonaponei Si Epitaxy ma SiC Epitaxy, o lenei fofo e mautinoa ai le lelei ma le tumau.
I le gaosiga o gaosiga, MOCVD Susceptor e taua tele, faʻatasi ai ma vaega e pei o le PSS Etching Carrier, ICP Etching Carrier, ma le RTP Carrier, lea e faʻamalieina ai le siosiomaga tuputupu aʻe epitaxial. Semicera's Blue/green LED epitaxy ua mamanuina e maua ai le lagolago mautu mo le LED Epitaxial Susceptor, Barrel Susceptor, ma le Monocrystalline Silicon, faʻamautinoa le gaosiga o taunuʻuga tumau, maualuga.
O lenei faiga epitaxy e taua tele mo le fatuina o Vaega Photovoltaic ma lagolagoina talosaga e pei o le GaN i luga o le SiC Epitaxy, faʻaleleia atili le lelei o le semiconductor. Pe i totonu o le Pancake Susceptor configuration pe faʻaaogaina i isi seti faʻapipiʻi, semicera's Blue/green LED epitaxy solutions ofo atu faʻatuatuaina faʻatinoga, fesoasoani i tagata gaosi oloa e faʻafetaui le faʻatupulaia o manaʻoga mo vaega maualuga LED.
Vaega autu:
1. maualuga le vevela oxidation tetee:
o loʻo lelei tele le faʻamaʻiina o le faʻamaʻi pe a maualuga le vevela ile 1600 C.
2. maualuga le mama: faia e vailaau ausa tuu i lalo o le maualuga vevela tulaga chlorination.
3. Erosion tete'e: maualuga ma'a'a, fa'apipi'i luga, vaega laiti.
4. Tete'e a'a: acid, alkali, masima ma organic reagents.
Fa'amatalaga Autu oFa'apipi'i CVD-SIC
| SiC-CVD Meatotino | ||
| Fauga tioata | FCC β vaega | |
| Malosi | g/cm ³ | 3.21 |
| Malosi | Vickers maaa | 2500 |
| Tele o Saito | μm | 2~10 |
| Vailaau Mama | % | 99.99995 |
| Malosiaga vevela | J·kg-1 ·K-1 | 640 |
| Sulimation Temperature | ℃ | 2700 |
| Malosi Felexural | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt pi'o, 1300℃) | 430 |
| Fa'alauteleina o le vevela (CTE) | 10-6K-1 | 4.5 |
| Fa'avevela vevela | (W/mK) | 300 |
