Semicerao lo'o fa'ailoa mai ma le fa'amaualuga lona pito siliGaN Epitaxy'au'aunaga, ua mamanuina e fa'afetaui ai mana'oga fa'atuputeleina o le alamanuia semiconductor. Gallium nitride (GaN) o se mea e iloa mo ona uiga faʻapitoa, ma o matou faʻagasologa o le tuputupu aʻe o le epitaxial e faʻamautinoa ai o loʻo faʻataunuʻuina atoatoa nei faʻamanuiaga i au masini.
Layers GaN maualuga Semicerafaʻapitoa i le gaosiga o tulaga maualugaGaN Epitaxyfa'afanua, ofoina atu le mama atoatoa meafaitino ma le fa'atulagaina fa'amaoni. O nei laulau e taua tele mo le tele o faʻaoga, mai le eletise eletise i le optoelectronics, lea e manaʻomia ai le maualuga o le faʻatinoga ma le faʻamaoni. O a matou metotia faʻatupulaia saʻo e faʻamautinoa ai e ausia e taʻitasi GaN ia tulaga faʻapitoa e manaʻomia mo masini faʻapitoa.
Fa'atonuina mo le Fa'atinoO leGaN Epitaxysaunia e Semicera ua fa'ainisinia fa'apitoa e fa'aleleia ai le lelei o au vaega fa'aeletoroni. E ala i le tuʻuina atu o faʻamaʻi maualalo, maualuga le mama GaN layers, matou te mafai ai ona faʻaogaina masini i luga o laina maualuga ma voltages, faʻatasi ai ma le faʻaitiitia o le eletise. O lenei fa'ata'ita'iga o le ki lea mo fa'aoga e pei o le maualuga-eletonika-mobility transistors (HEMTs) ma moli-emitting diodes (LEDs), lea e sili ona taua le lelei.
Avanoa Talosaga Fetuuna'i Semicera'sGaN Epitaxye tele, fa'amalieina le tele o alamanuia ma fa'aoga. Pe o lo'o e atia'e mea fa'aola eletise, vaega RF, po'o le laser diodes, o matou GaN epitaxial layers e maua ai le fa'avae mana'omia mo masini fa'atuatuaina maualuga. E mafai ona fa'atulagaina a matou fa'agasologa ina ia fa'amalieina mana'oga fa'apitoa, fa'amautinoa e maua e au oloa i'uga lelei.
Tautinoga i Tulaga LeleiO le tulaga lelei o le maatulimanu oSemicera's approach toGaN Epitaxy. Matou te faʻaaogaina tekinolosi faʻatupulaia epitaxial ma faiga faʻatonutonu lelei e maua ai le GaN laulau e faʻaalia ai le tutusa lelei, maualalo le faʻaletonu, ma mea e sili atu. O lenei tautinoga i tulaga lelei e faʻamautinoa ai e le gata ina ausia au masini ae sili atu i tulaga o alamanuia.
Fa'atekonolosi Fa'atuputupula'ia Semicerao lo'o taulamua i le fa'afouga i le fanua oGaN Epitaxy. O loʻo faʻaauau pea ona suʻesuʻeina e la matou 'au auala fou ma tekinolosi e faʻaleleia ai le faʻagasologa o le tuputupu aʻe, tuʻuina atu le GaN layers ma faʻaleleia atili eletise ma faʻamafanafana. O nei fa'afouga fa'aliliuina i masini e sili atu ona fa'atinoina, e mafai ona fa'afetaui mana'oga o isi augatupulaga talosaga.
Fofo Fa'apitoa mo Au PoloketiI le iloaina o poloketi taitasi e iai manaoga tulaga ese,Semiceraofo fa'apitoaGaN Epitaxyfofo. Pe e te manaʻomia ni faʻamatalaga faʻapitoa o doping, mafiafia o le lapisi, poʻo le faʻamaeʻaina o luga, matou te galulue vavalalata ma oe e atiaʻe se faiga e fetaui ma ou manaʻoga tonu. O la matou sini o le tuʻuina atu ia te oe o GaN layers e saʻo faʻainisinia e lagolago ai le faʻatinoga ma le faʻamaoni o lau masini.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
