Semicerafaailoa mai lona tulaga maualugaO le Epitaxy'au'aunaga, ua fuafuaina e fa'amalieina tulaga fa'ata'atia o le alamanuia semiconductor i aso nei. Epitaxial silicon layers e taua tele mo le faʻatinoga ma le faʻatuatuaina o masini faʻaeletoroni, ma o matou Si Epitaxy fofo e faʻamautinoa ai o au vaega e ausia galuega sili ona lelei.
Fa'ato'aga Sili-Tula'i Sili Semiceramalamalama o le faavae o masini maualuga-faatinoga o loʻo taoto i le lelei o mea faʻaaogaina. O tatouO le Epitaxye fa'atonu lelei le fa'agasologa ina ia maua ai fa'a'a'ai kosi ma tulaga fa'apitoa ma le fa'amaoni tioata. O nei laulau e taua tele mo faʻaoga e amata mai i microelectronics i masini eletise maualuga, lea e sili ona taua le tumau ma le faʻamaoni.
Fa'atonuina mo le fa'atinoga o masiniO leO le Epitaxy'au'aunaga o lo'o ofoina mai e Semicera o lo'o fa'atulagaina e fa'aleleia atili ai le eletise o au masini. E ala i le fa'atupuina o laulau silikoni mama-maualalo ma le tele o fa'aletonu, matou te fa'amautinoa o lo'o fa'atinoina au vaega i le mea sili, fa'atasi ai ma le fa'aleleia atili o le fe'avea'i ma fa'aitiitia le fa'asao eletise. O lenei fa'ata'ita'iga e taua tele mo le fa'ataunu'uina o uiga maualuga-saosaoa ma maualuga-lelei e mana'omia e tekinolosi fa'aonaponei.
Fetuuna'i i Talosaga Semicera'sO le Epitaxye talafeagai mo le tele o faʻaoga, e aofia ai le gaosiga o le CMOS transistors, power MOSFETs, ma le bipolar junction transistors. O la matou faiga fetuutuunai e mafai ai ona faʻapipiʻiina e faʻavae i luga o manaʻoga faʻapitoa o lau poloketi, pe e te manaʻomia ni laupepa manifinifi mo faʻaoga maualuga pe sili atu le mafiafia mo masini eletise.
Tulaga Sili MeaO le lelei o le fatu lea o mea uma matou te faia i Semicera. O tatouO le Epitaxyfa'agasologa fa'aogaina meafaigaluega fa'aonaponei fa'aonaponei ma faiga fa'apitoa e fa'amautinoa ai e fa'amalieina ta'itasi fa'a-silikoni tulaga maualuga o le mama ma le fa'atonuga fa'atulagaina. O le gauai atu i auiliiliga e faaitiitia ai le tulai mai o faaletonu e ono aafia ai le faatinoga o masini, ma maua ai vaega sili atu ona faatuatuaina ma umi.
Tautinoga i Faiga Fou Semiceraua tautino e tumau i le pito i luma o tekinolosi semiconductor. O tatouO le Epitaxy'au'aunaga o lo'o atagia ai lenei tautinoga, fa'atasi ai ma fa'auluuluga aupito lata mai i le fa'atupuina o le epitaxial techniques. Matou te faʻaauau pea ona faʻaleleia a matou faʻagasologa e tuʻuina atu ai lapisi silicon e fetaui ma manaʻoga faʻaleleia o le alamanuia, faʻamautinoa o loʻo tumau pea au oloa i le tauvaga i le maketi.
Fofo Fa'atatau mo ou Mana'ogaMalamalama o galuega uma e tulaga ese,Semiceraofo fa'apitoaO le Epitaxyfofo e fetaui ma ou manaoga faapitoa. Pe e te manaʻomia ni faʻamatalaga faʻapitoa o le doping, mafiafia o le lapisi, poʻo le faʻamaeʻaina o luga, e galulue vavalalata le matou 'au e tuʻuina atu se oloa e fetaui ma au faʻamatalaga saʻo.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
