Silicon fa'avae GaN epitaxy

Fa'amatalaga o oloa

E saunia e le matou kamupaniSiC fa'apipi'ifaiga auaunaga e ala CVD auala i luga o le graphite, ceramics ma isi mea, ina ia faʻapitoa kasa o loʻo i ai carbon ma silicon tali i le vevela maualuga e maua ai le mama maualuga mole SiC, molelaʻau teuina i luga o le pito i luga o mea ufiufi, faia.SIC puipui puipui.

Vaega autu:

1. maualuga le vevela oxidation tetee:

o loʻo lelei tele le faʻamaʻiina o le faʻamaʻi pe a maualuga le vevela ile 1600 C.

2. maualuga mama: faia e vailaau ausa tuu i lalo o le maualuga vevela tulaga chlorination.

3. Erosion tete'e: maualuga ma'a'a, fa'apipi'i luga, vaega laiti.

4. Tete'e a'a: acid, alkali, masima ma organic reagents.