Semiceraofo atu ma le mitamitaGa2O3Epitaxy, o se fofo faʻaonaponei ua mamanuina e tuleia ai tuaoi o eletise eletise ma optoelectronics. O lenei tekinolosi epitaxial alualu i luma e faʻaaogaina mea uiga ese o le Gallium Oxide (Ga2O3) e tuʻuina atu faʻatinoga sili atu i talosaga manaʻomia.
Vaega Autu:
• Avanoa Lautele Avanoa: Ga2O3Epitaxyo lo'o fa'aalia ai se va'a tele-lautele, fa'ataga mo volisi malepelepe maualuga ma fa'agaioiga lelei i si'osi'omaga maualuga.
•Amioga vevela maualuga: O le epitaxial layer e maua ai le lelei tele o le faʻaogaina o le vevela, faʻamautinoaina le faʻaogaina o le faʻaogaina e tusa lava pe i lalo o le maualuga o le vevela, faʻapitoa mo masini maualuga.
•Tulaga Sili Mea: Ausia le tulaga maualuga tioata ma ni faaletonu laiti, faʻamautinoaina le lelei o le faʻatinoga o masini ma le umi o le ola, aemaise lava i faʻaoga taua e pei o transistors eletise ma UV detectors.
•Fetuuna'i i Talosaga: E fetaui lelei mo eletise eletise, talosaga RF, ma optoelectronics, e maua ai se faavae faʻalagolago mo masini semiconductor e sosoo ai.
Saili le gafatia oGa2O3Epitaxyfa'atasi ai ma fofo fou a Semicera. O a matou oloa epitaxial ua mamanuina ina ia ausia tulaga maualuga o le lelei ma le faʻatinoga, e mafai ai e au masini ona faʻaogaina ma le maualuga ma le faʻamaoni. Filifili Semicera mo tekonolosi semiconductor pito sili ona lata mai.
| Aitema | Gaosiga | Suesuega | Faafoliga |
| Parata tioata | |||
| Polytype | 4H | ||
| Fa'asagaga i luga o mea sese | <11-20 >4±0.15° | ||
| Fa'aeletise Parata | |||
| Fa'amama | n-ituaiga Nitrogen | ||
| Tete'e | 0.015-0.025ohm·cm | ||
| Fa'ailoga Fa'ainisinia | |||
| Diamita | 150.0±0.2mm | ||
| mafiafia | 350±25 μm | ||
| Primary flat orientation | [1-100]±5° | ||
| Muamua mafolafola umi | 47.5±1.5mm | ||
| Lua mafolafola | Leai | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| punou | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| A'ai | ≤35 μm | ≤45 μm | ≤55 μm |
| Luma(Si-foliga) talatala(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Fauga | |||
| Micropipe density | <1 ae/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Uamea eleelea | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Tulaga Luma | |||
| Luma | Si | ||
| Fa'ai'uga luga | Si-foliga CMP | ||
| fasimea | ≤60ea/wafer (tele≥0.3μm) | NA | |
| Masisi | ≤5ea/mm. Fa'aputuga umi ≤Diamita | Fa'aputuga umi≤2*Diamita | NA |
| Pa'u moli/lua/pisa/striations/ta'eta'e/fa'aleagaina | Leai | NA | |
| Ta'otoga meataalo/indents/ gau/papa hex | Leai | ||
| Polytype vaega | Leai | Vaega fa'aopoopo≤20% | Vaega fa'aopoopo≤30% |
| Faailoga leisa pito i luma | Leai | ||
| Tulaga Tulaga | |||
| Fa'ai'u tua | C-foliga CMP | ||
| Masisi | ≤5ea/mm, Fa'aputuga umi≤2* Diamita | NA | |
| faaletonu i tua | Leai | ||
| Talatala tua | Ra≤0.2nm (5μm*5μm) | ||
| Faailoga leisa tua | 1 mm (mai le pito i luga) | ||
| pito | |||
| pito | Chamfer | ||
| afifiina | |||
| afifiina | Epi-sauni ma fa'apipi'i gaogao afifiina kaseti tele-wafer | ||
| *Faamatalaga: "NA" o lona uiga e leai se talosaga O mea e le o taʻua e mafai ona faasino ile SEMI-STD. | |||
