O le vaega lona tolu o mea semiconductor e masani ona aofia ai SiC, GaN, taimane, ma isi, aua o lona lautele gap lautele (Eg) e sili atu pe tutusa ma le 2.3 electron volts (eV), e lauiloa foi o mea lautele gap semiconductor mea. Pe a faatusatusa i mea semiconductor augatupulaga muamua ma lona lua, o le lona tolu o augatupulaga semiconductor mea e maua ai le tulaga lelei o le conductivity vevela maualuga, fanua malepe eletise maualuga, maualuga saturated electron fua faatatau femalagaiga ma le malosi fusia maualuga, lea e mafai ona ausia manaoga fou o tekinolosi faaonaponei mo le maualuga. vevela, malosi maualuga, maualuga maualuga, maualuga taimi ma faʻavevela tetee ma isi tulaga faigata. O loʻo i ai faʻamoemoega faʻaoga taua i vaega o le puipuiga a le atunuʻu, vaʻalele, aerospace, suʻesuʻega suauʻu, teuina o mata, ma isi, ma e mafai ona faʻaitiitia le malosi o le malosi e sili atu i le 50% i le tele o pisinisi faʻapitoa e pei o fesoʻotaʻiga lautele, malosi o le la, gaosiga o taavale, moli semiconductor, ma smart grid, ma e mafai ona faaitiitia le tele o meafaigaluega e sili atu i le 75%, lea e taua tele mo le atinaeina o le faasaienisi ma tekinolosi tagata.
Aitema 项目 | GaN-FS-CU-C50 | GaN-FS-CN-C50 | GaN-FS-C-SI-C50 |
Diamita | 50.8 ± 1 mm | ||
mafiafia厚度 | 350 ± 25 μm | ||
Fa'atonuga | C vaalele (0001) ese le tulimanu agai i le M-axis 0.35 ± 0.15° | ||
Palemia mafolafola | (1-100) 0 ± 0.5°, 16 ± 1 mm | ||
Lua Flat | (11-20) 0 ± 3°, 8 ± 1 mm | ||
Conductivity | N-ituaiga | N-ituaiga | Semi-Insulating |
Tete'e (300K) | <0.1 Ω·cm | <0.05 Ω·cm | > 106 Ω·cm |
TTV | ≤ 15 μm | ||
FUA | ≤ 20 μm | ||
Ga Mata Fa'amata'u | <0.2 nm (faila); | ||
po'o le <0.3 nm (fa'aiila ma togafitiga i luga ole epitaxy) | |||
N Foliga Laugatasi | 0.5 ~ 1.5 μm | ||
filifiliga: 1 ~ 3 nm (eleele lelei); <0.2 nm (fa'aiila) | |||
Dislocation Density | Mai le 1 x 105 i le 3 x 106 cm-2 (fa'atatau ile CL)* | ||
Mata'utia Fa'aletonu Matele | <2 cm-2 | ||
Nofoaga Fa'aaogā | > 90% (tu'u ma macro fa'aletonu le aofia) | ||
E mafai ona faʻatulagaina e tusa ai ma manaʻoga o tagata faʻatau, fausaga eseese o le silicon, safaira, SiC faʻavae GaN epitaxial pepa. |